IMAGE PROCESSING METHOD, SHAPE INSPECTION METHOD, IMAGE PROCESSING SYSTEM, AND SHAPE INSPECTION SYSTEM

摘要

In this image processing method, data pertaining to an estimated captured image obtained from reference data of a sample is acquired using an input acceptance unit, an estimation unit, and an output unit, the data being used when comparing the estimated captured image and an actual captured image of the subject, wherein the method includes: an input step in which the input acceptance unit accepts input of the reference data, step information pertaining to the sample, and trained model data; an estimation step in which the estimation unit uses the reference data, the step information, and the model data to calculated captured image statistics, which represents a probabilistic distribution of values that can be attained by the data of the captured image; and an output step in which the output unit outputs the captured image statistics, it being possible to generate the estimated captured image from the captured image statistics. This makes it possible to reduce the time required for estimation and to perform comparison in real time when comparing a simulation image estimated from design data and an image that has actually been captured.