Michelson interferometer and Fourier transform infrared spectrometer equipped with the same

摘要

The Michelson interferometer comprises a fixed mirror, a moving mirror, a moving mechanism, and a beam splitter.The moving mirror is provided movably in one direction and in the opposite direction.The moving mechanism moves the moving mirror in one direction and in the opposite direction.The Michelson interferometer further comprises a tilt detection section and a judging section.The inclination of the moving mirror during the movement of the moving mirror is detected by the inclination detecting portion.Based on the change in the detected inclination, the deterioration of the moving mechanism is judged by the judging unit.