CERTIFIED FERROELECTIC SPECIFIC STOCKS FOR SPECIAL STOCKS AND THEIR MANUFACTURING PROCEDURES

摘要

A controlled ferro-electric storage cell comprises a dielectric material layer arranged over a substrate, a metallic lower electrode, a ferro-electric dielectric layer that contacts a top of the lower electrode, a pillar-semiconductor channel, which is above the ferro-electric dielectric layer and is Capacitively coupled through the ferro-electric dielectric layer with the metallic lower electrode, a gate-dielectric layer which is a horizontal gate-dielectric section above the ferro-electric dielectric layer, and a tube-shaped gate-dielectric section,which surrounds the pillar-semiconductor channels laterally, has a gate-electrode strip that lies above the horizontal gate-dielectric section and surrounds the tube-shaped gate-dielectric section laterally, and a metallic upper electrode that contacts a top of the pillar-semiconductor channel.