FERROELECTRIC TUNNEL TRANSMISSION SPECIFIC PREPARATION USING A MAGNESIUMOXID TUNNING DIRECTIVE AND PROCEDURES FOR DEVELOPMENT

摘要

A ferro-electric tunnel storage device (FTJ storage device) has a lower electrode over a substrate, an upper electrode placed over the lower electrode, and a ferro-electric tunnel storage element between the lower electrode and the upper electrode. The ferro-electric tunnel transition storage element shall have at least one ferro-electric material layer and at least one dielectric tunnel layer.