MEMS DEVICE TRANSMISSION SYSTEM, HIGH FREQUENCY AND HIGH MECHANICAL KIPPING WINKLE FOR GREAT PLAYERS

摘要

A microelectromechanical system (MEMS) component, comprising an oscillator structure designed to oscillate a rotational axis; a frame that is rotating, the frame comprising a frame saving within which the oscillator structure is suspended; and a suspension device mechanically coupled to and between the oscillator structure and the frame, the suspension device being designed to hang the oscillator structure within the frame savings, the suspension arrangement includes a central support beam, which extends along the axis of rotation,where the central support beam is mechanically coupled with and between the oscillator structure and the frame; a first external support beam mechanically coupled to the oscillator structure and laterally moved from the central support beam in a first orthogonal direction to the rotational axis; and at least a first inner support beam directly connected to and between the central support beam and the first outer support beam.