PS-b-PMMA block copolymer having crosslinkable functional group and the method thereof

摘要

The present invention is a polystyrene-block-polymethylmethacrylate (PS-b-PMMA) block copolymer in which a functional group capable of forming a crosslink in the polystyrene (PS) block of the block copolymer is introduced, and It relates to a manufacturing method thereof. According to the PS-b-PMMA block copolymer into which a crosslinkable functional group is introduced according to the present invention, a crosslinkable functional group is introduced into the polystyrene (PS) block, compared to the conventional PS-b-PMMA block copolymer. ), the etch resistance of the block is increased, and thus the etch selectivity is improved.