首页>
外国专利>
MANUFACTURING METHOD OF UNCLONABLE SECURITY DEVICE AND UNCLONABLE SECURITY DEVICE THEREOF
MANUFACTURING METHOD OF UNCLONABLE SECURITY DEVICE AND UNCLONABLE SECURITY DEVICE THEREOF
展开▼
机译:不可分布的安全装置和不可渗透安全装置的制造方法
展开▼
页面导航
摘要
著录项
相似文献
摘要
The method of manufacturing a security device according to this embodiment comprises the steps of forming a gate on a substrate, forming a gate insulating film, forming a CNT layer, forming a source and drain, and removing the exposed CNT layer to form a channel forming a pattern.
展开▼