Batch process monitoring device and batch process monitoring method

摘要

PROBLEM TO BE SOLVED: To execute appropriate abnormality determination in a batch process repeating the same processing.;SOLUTION: The batch process monitoring device comprises a measurement data acquisition unit for acquiring measurement data at each time from the start to the end of a batch process, an index calculation unit for calculating a monotonically increasing index which is a value monotonically increasing with respect to the lapse of each time on the basis of difference between the measurement data and reference data according to the batch, and an abnormality determination unit for determining whether or not the batch has abnormality on the basis of the monotonically increasing index.;SELECTED DRAWING: Figure 5;COPYRIGHT: (C)2018,JPO&INPIT