首页> 外国专利> METHOD FOR DOUBLE-SIDED LAPPING WORKPIECE, METHOD FOR PRODUCING WORKPIECE, AND DOUBLE-SIDED LAPPING APPARATUS FOR WORKPIECE

METHOD FOR DOUBLE-SIDED LAPPING WORKPIECE, METHOD FOR PRODUCING WORKPIECE, AND DOUBLE-SIDED LAPPING APPARATUS FOR WORKPIECE

机译：双面研磨工件的方法，生产工件的制造方法，工件双面研磨装置

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摘要

According to the present invention, the sum and the ratio of the torque of a sun gear and the torque of a internal gear are controlled to be within predetermined ranges.

机译：根据本发明，将防晒齿轮的扭矩和内齿轮的扭矩的总和控制在预定的范围内。

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公开/公告号WO2021250937A1

专利类型
公开/公告日2021-12-16

原文格式PDF
申请/专利权人 SUMCO CORPORATION;
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申请/专利号WO2021JP04304
发明设计人 TAKAISHI KAZUSHIGE;TSAI CHIN FU;
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申请日2021-02-05
分类号B24B37/005;B24B37/08;B24B49/16;H01L21/304;
国家 JP
入库时间 2022-08-24 22:53:48

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