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CHEMICAL POLISHING SOLUTION USED FOR SURFACE TREATMENT OF COPPER OR COPPER ALLOYS, AND SURFACE TREATMENT METHOD

机译:用于铜或铜合金表面处理的化学抛光溶液,以及表面处理方法

摘要

The present invention pertains to a treatment solution for appropriately removing natural oxide films or organic substances present on the surface of copper or copper alloys. The present invention provides a chemical polishing solution used for surface treatment of copper or copper alloys, the chemical polishing solution containing, on the basis of the total amount of the chemical polishing solution, (A) 0.1-3.5 mass% of hydrogen peroxide, (B) 1-20 mass% of at least one selected from the group consisting of sulfuric acid and nitric acid, (C) 0.05-0.8 mass% of a fluoride in terms of fluorine atoms, (D) 0.01-1 mass% of at least one selected from the group consisting of anthranilic acid, cyclohexylamine, cyclohexanol, and 1,5-pentanediol, (E) 0.0005-0.005 mass% of a fluorine-based surfactant, and (F) water.
机译:本发明涉及适当地除去存在于铜或铜合金表面上存在的天然氧化膜或有机物质的处理溶液。 本发明提供一种用于铜或铜合金表面处理的化学抛光溶液,含有化学抛光溶液的化学抛光溶液,基于化学抛光溶液的总量(a)0.1-3.5质量%的过氧化氢( b)从氟原子中由硫酸和硝酸的至少一种选自氟酸和硝酸,(c)0.01-1质量%的氟化物的1-20质量%。(c)0.01-1质量% 选自氟基酸,环己胺,环己醇和1,5-戊二醇,(e)0.0005-0.005质量%的氟基表面活性剂和(f)水中的至少一种。

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