A method of providing a MEMS device comprising pyramidal protrusions, and a mold

摘要

A method of providing a MEMS device, such as an AFM probe, comprising a three-sided pyramidal protrusion is achieved using a plurality of MEMS method steps. In order to enable reliable and rapid large-scale fabrication of such MEMS devices comprising three-sided protrusions, in which the protrusions have a relatively small semiconical angle and a single apex, a mold is used. The mold includes a sacrificial layer over the base substrate. A method of providing a MEMS device comprising the steps of: providing a region on a first side of a mold, the region comprising a pit having a layer of overhang material; - patterning the layer of protrusion material into a desired shape; and isotropically etching the sacrificial layer of the mold, using an isotropic etchant capable of etching the sacrificial layer, to separate the MEMS device from at least the base substrate of the mold.