A method for measuring the heat distribution in a specific space using a heat sensing probe, a method and a device for detecting the beam spot of a light source.

摘要

PROBLEM TO BE SOLVED: To provide a method for measuring a heat distribution in a specific space by using a heat sensing probe, a method for detecting a beam spot of a light source, and an apparatus. A method for measuring a heat distribution in a specific space is a step of linearly moving a heat sensing probe 110 capable of measuring a temperature change in the specific space; and a heat sensing probe during the step of moving the heat sensing probe 110. The step of calculating the heat distribution in a specific space using the continuous temperature change value obtained from the needle 110; is included. According to the method for measuring the heat distribution in a specific space using the heat sensing probe 110 of the present invention, the method for detecting the beam spot of the light source R, and the device, the heat sensing probe 110 is used in a small space. It is possible to map the temperature distribution of the beam and use it to accurately detect the beam spot. [Selection diagram] Fig. 2