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Photosensitive transfer material, manufacturing method of resin pattern, method of manufacturing circuit wiring, manufacturing method of touch panel, and film and its manufacturing method

机译:光敏传递材料,树脂图案的制造方法,制造电路布线的方法,触摸面板的制造方法及薄膜及其制造方法

摘要

The photosensitive transfer material has a temporary support and a photosensitive resin layer provided on the temporary support, wherein the temporary support comprises a particle containing layer containing particles, and the surface roughness of the surface of the temporary support body opposite the side of the side having the photosensitive resin layer is 0.02 μ M μ The photosensitive resin layer contains a polymer containing a constituent unit having an acid group protected by an acid degradable group and a photo acid generator.Manufacturing method of resin pattern using the transfer material, manufacturing method of circuit wiring, manufacturing method of the touch panel, and having the particle containing layer, the Hayes value is 0.2% or less, and the surface roughness Ra of the side having the particle containing layer is 0.02 μ M μ A film and a manufacturing method thereof are also provided.
机译:光敏转移材料具有临时支撑和在临时支撑件上提供的光敏树脂层,其中临时支持物包括含有颗粒的颗粒层,并且临时支撑体的表面的表面粗糙度与侧面的侧面相对 光敏树脂层为0.02μmμ,光敏树脂层含有含有由酸性可降解基团和光酸发生器保护的酸基的聚合物的聚合物。使用转移材料的树脂图案的制造方法,电路制造方法 接线,触摸面板的制造方法,具有颗粒的层,Hayes值为0.2%以下,并且具有颗粒含层的侧面的表面粗糙度Ra为0.02μmμA膜及其制造方法 也提供。

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