Sensor arrangement and method for detecting an amount or a concentration of a target fluid in a medium with the sensor arrangement

摘要

According to one embodiment, a sensor arrangement has a first micropump, e.g. a microfluid or peristaltic pump, which has a normally closed (NC) safety valve, e.g. at the micropump outlet, a second micropump, e.g. a microfluid or peristaltic pump, which has a normally closed ( NC) safety valve, e.g. at the micropump outlet, and a sensor which has a sensor chamber, e.g. a sensor cavity or sensor volume, with a sensor element, e.g. an active sensitive region or layer, in the sensor chamber, the sensor being designed to provide a sensor output based on a condition of the fluid, such as a gas or liquid, in the sensor chamber. The sensor chamber of the sensor is fluidically coupled between the first and the second micropump, and the first and the second micropump are designed to provide a defined operating mode of the sensor arrangement on the basis of the respective activation or operating condition of the first and the second micropump for providing (1) a a defined negative fluid pressure in the sensor chamber, (2) a defined positive fluid pressure in the sensor chamber or (3) a defined fluid flow, for example fluid throughput, through the sensor chamber.