Inclination surface boundary position identification method, slanted surface boundary position identifying device, and inclined surface boundary position identification program

摘要

To provide an inclined plane border position identifying method capable of accurately identifying a border position of an inclined plane even when intensity of light reflected and dispersed by a measurement object and detected by a detector is small.SOLUTION: An inclined plane position identifying method sets a virtual plane 22 in parallel with a border plane which is a plane including a border 13 between a first plane and a second plane of a measurement object having a first plane 11 and a second plane 12 mutually different in inclination, and includes: an extraction step of extracting a height smaller than a virtual plane in a measurement point height which is a distance from a reference plane optically measured among respective measurement points 17 inside the measurement area including the border, while changing a virtual plane height h which is the distance between the virtual plane and the reference plane; an integrated luminance calculation step of subjecting measurement point luminance to logarithmic conversion so as to be totaled and calculating the integrated luminance with respect to the measurement point extracted by the extraction step; and identifying step of identifying a position of the border plane by identifying a curve point of a curve showing the relation between the integrated luminance and the virtual plane height.SELECTED DRAWING: Figure 2