Light irradiation device, light processing device using light irradiation device, light irradiation method, and optical processing method

摘要

A light illumination device, a light processing apparatus using the light illumination device, and a light illumination method. The light illumination device (100) includes a light source (101) to emit laser light, a condenser lens (60) to converge the laser light to a desired convergence position, a first light controller (21) configured to perform a changing operation on a cross section of an incident beam of the laser light, and a second light controller (22) to convert a phase distribution of a transmitted wavefront of the laser light. The light illumination method includes converting (S103) a phase distribution of a transmitted wavefront of light emitted from a light source (101), changing (SI04) a ratio between a first diameter of a cross section perpendicular to an optical axis of the light whose phase distribution of the transmitted wavefront is converted in the converting (S103) along a first axis and a second diameter along a second axis perpendicular to the first axis and the optical axis of the light, and condensing (S105) the light whose ratio between the first diameter and the second diameter is changed in the changing (S104).