Method for the characterization of objects by means of scattered radiation analysis and related instrumentations

摘要

A method for characterizing particle objects comprises generating a radiation beam, illuminating with the radiation beam an observation region transited by a particle object, collecting an interference image determined by an interference between a transmitted fraction and a part of the scattered fraction of the radiation beam that propagates around the direction of the optical axis, collecting a part of the scattered fraction that propagates at the scattering angle, and measuring at least one scattered radiation intensity value determined by the part of the scattered fraction, calculating, from the interference image, a pair of independent quantities that define the complex field of the first part of the scattered fraction, calculating, starting from the pair of independent quantities, a theoretical value of scattered radiation intensity, and comparing the measured value with the theoretical scattered radiation intensity value.