TUNABLE OPTICAL FILTER DEVICE AND SPECTRAL IMAGING SYSTEM

摘要

A tunable optical filter device, comprising a first substrate (104, 201) having a first reflection structure and a second substrate (108, 207) having a second reflection structure. The surface peripheries having the reflection structures of the first substrate (104, 201) and the second substrate (108, 207) are bonded to each other by means of a bonding compound (106, 205) to form a cavity between the reflection structures, and optical material blocks (109, 209) of different thicknesses are distributed on the surface having the reflection structure of the first substrate (104, 201) and/or the second substrate (108, 207) in the cavity. A spectral imaging system, comprising a tunable optical filter device, and further comprising an imaging chip (402). The tunable optical filter device and the imaging chip (402) are bonded to each other. Another spectral imaging system, comprising a tunable optical filter device. one of a first substrate (104, 201) and a second substrate (108, 207) of the tunable optical filter device is an imaging chip (402).