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NANOGAP ELECTRODE STRUCTURE, METHOD FOR MANUFACTURING SAME, ANALYSIS DEVICE AND ANALYSIS METHOD
NANOGAP ELECTRODE STRUCTURE, METHOD FOR MANUFACTURING SAME, ANALYSIS DEVICE AND ANALYSIS METHOD
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机译:纳米孔电极结构,制造方法,分析装置和分析方法
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摘要
Provided are a nanogap electrode structure that enables stable formation of a nanogap by an easy way, a method for manufacturing the same, an analysis device and an analysis method. The nanogap electrode structure 10 comprises an insulating film 11 that has a nanopore 13, said nanopore allowing the passage of a sample therethrough, and a nanogap electrode 12 that is formed on the insulating film 11 and provided with a nanogap 17 between a pair of electrode parts 14a and 14b. The pair of electrode parts 14a and 14b have an above-nanopore region 15 that is positioned above the nanopore 13, and a connection region 16 that is positioned above the insulating film 11 and connected to the above-nanopore region 15. The nanogap 17 is formed within the above-nanopore region 15.
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