ABNORMAL MODULATION CAUSE IDENTIFYING DEVICE, ABNORMAL MODULATION CAUSE IDENTIFYING METHOD, AND ABNORMAL MODULATION CAUSE IDENTIFYING PROGRAM

摘要

The present invention improves the performance for identifying the cause of an abnormal modulation in production equipment. This abnormal modulation cause identifying device comprises: a process data acquisition unit that reads out process data from a storage device which stores a plurality of types of process data that are continuously output by a plurality of sensors provided to production equipment; an abnormality determination unit that calculates an abnormality degree which indicates the degree of modulation in the process data read out by the process data acquisition unit; and a cause diagnosis unit that determines the accuracy of a cause of modulation on the basis of the proportion of process data, from among the plurality of types of process data, for which the abnormality degree calculated by the abnormality determination unit satisfies a prescribed criteria, such determination carried out using causal relationship information that defines a combination of a cause and a modulation in the plurality of types of process data which appears as an impact generated by the cause.