Bonding tool and its manufacturing method, as well as bonding equipment and bonding method

摘要

The bonding tool of the present disclosure includes a main body portion and a pressing portion connected to the main body portion, and the pressing portion includes a plurality of first grooves and a tip surface having a plurality of second grooves intersecting the first grooves. It is equipped with a slope connecting to the tip surface, and the difference between the cutting level at a load length rate of 25% on the roughness curve of the tip surface and the cutting level at a load length rate of 75% on the roughness curve. The cutting level difference (Rδc) in the roughness curve representing the above is 0.15 μm to 2 μm. [Selection diagram] Fig. 3