SIMULATION METHOD SIMULATION PROGRAM PROCESSING APPARATUS SIMULATOR AND DESIGN METHOD

摘要

The simulation method of the present invention obtains processing conditions when a predetermined processing treatment using plasma is performed on a workpiece, and based on the processing conditions, at a predetermined evaluation point of the surface of the workpiece, From the evaluation point, a solid angle corresponding to a viewing area that can look out into the plasma space is calculated, and a function is used that takes as a factor the reaction probability between the solid angle and the evaluation point of radicals incident on the evaluation point, the flux method and calculating the amount of incident radicals incident on the evaluation point by