A manufacturing process determination apparatus of a substrate processing apparatus, a substrate processing system, the manufacturing process determination method of a substrate processing apparatus, a learning model group, the generationgeneration method of a learning model group, and a program

摘要

[Problem] To provide a manufacturing process determination apparatus for a substrate processing apparatus capable of easily suppressing a decrease in determination accuracy. [Solution means] The manufacturing process determination device 20 includes a process log acquisition unit 21 that acquires process log data of the substrate processing apparatus 10 , creates input data based on the process log data, and adds the input data to the process log data. Based on the determination unit 22 that makes a determination related to the manufacturing process of the substrate processing apparatus is provided. The judging unit includes a plurality of learning models 25 to which input data are respectively input and respectively outputting judgment results related to the manufacturing process, and the plurality of learning models are generated by performing machine learning using different teacher data. have. The determination unit can switch which learning model among a plurality of learning models is used to perform the determination.