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OLED Method of manufacturing the fine metal mask for OLED panel using one-step wet etching technology

机译:使用一步湿法蚀刻技术制造OLED面板的精细金属面膜的OLED方法

摘要

A method for manufacturing a fine metal mask (FMM) for manufacturing an OLED panel using one-step wet etching technology is disclosed. The FMM manufacturing method of Example 2 comprises: forming a metal layer for manufacturing an FMM for manufacturing an OLED panel, and photoresist on the upper and lower portions of the metal layer, respectively; and the metal layer coated with photoresist on the upper and lower portions is supported in an etchant, spaced apart from the metal layer by a certain distance to form a plurality of holes of the FMM for manufacturing the OLED panel, and at the upper and lower ends of the metal layer at the voltage of an external electric field. A one-step wet etching technique is performed by positioning the cathode (-) electrode and the anode (+) electrode, respectively, operated by the It includes the step of manufacturing an FMM for manufacturing an OLED panel using. Using a one-step wet etching process using an external electric field on the anode (+) and cathode (-) electrodes located at the top and bottom of the FMM material metal (Invar) to form a plurality of holes of the FMM for OLED panel manufacturing. It provides an FMM manufacturing method, and reduces the number of steps to a one-step wet etching process compared to the existing two-step wet etching process in order to manufacture an FMM for manufacturing an existing OLED panel, thereby reducing the manufacturing cost of the FMM and improving the yield.
机译:公开了一种使用一步湿法蚀刻技术制造用于制造OLED面板的精细金属掩模(FMM)的方法。实施例2的FMM制造方法包括:形成用于制造用于制造OLED面板的FMM的金属层,以及光致抗蚀剂在金属层的上部和下部;并且在上部和下部涂覆有光致抗蚀剂的金属层在蚀刻剂中支撑在蚀刻剂中,通过一定距离间隔开,以形成用于制造OLED面板的FMM的多个孔,并且在上部和下部在外部电场的电压下金属层的端部。通过将阴极()电极和阳极(+)电极分别定位由其操作的步骤来执行一步湿法蚀刻技术,包括制造用于制造OLED面板的FMM的步骤。使用位于FMM材料金属(Invar)的顶部和底部的阳极(+)和阴极( - )电极上的外部电场上使用一步湿法蚀刻工艺,以形成OLED的FMM的多个孔面板制造。它提供了一种FMM制造方法,与现有的两步湿法蚀刻工艺相比,减少了一步湿法蚀刻工艺的步骤数量,以便制造用于制造现有OLED面板的FMM,从而降低了制造成本FMM并提高产量。

著录项

  • 公开/公告号KR102323615B1

    专利类型

  • 公开/公告日2021-11-05

    原文格式PDF

  • 申请/专利权人 김용석;

    申请/专利号KR20200009540

  • 发明设计人 김용석;

    申请日2020-01-23

  • 分类号H01L51/56;G03F7/12;H01L51;

  • 国家 KR

  • 入库时间 2022-08-24 22:27:51

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