Water washable heat and plasma resistant coatings for laser interaction applications

摘要

Compositions and methods useful for singulation of brittle components from substrates by plasma singulation processes are described. A heat-resistant coating comprising a component exhibiting both heat resistance and water solubility is realized. These components with high UV interaction can laser interact to create masks for thin and small parts, e.g., substrates as thin as 150 microns or less, or allow parts to be presented that measure 1 mm or less on one side. can do it By applying the composition to an inorganic substrate, a laser of an ultraviolet source interacts with the surface and creates a mask, which is subsequently treated in a plasma chamber to isolate (singulation) the components inside the substrate, followed by rinsing with water. A method for removing/dissolving a laser interaction and plasma protective layer is provided. Once rinsed and cleaned, the component is processed by pick and place tooling for final integration into electronic circuitry. The coatings of the present invention are water-rinsable creations that achieve high selectivity for both laser and plasma operation.