SYSTEMS HAVING LIGHT SOURCE WITH EXTENDED SPECTRUM FOR SEMICONDUCTOR CHIP SURFACE TOPOGRAPHY METROLOGY

摘要

A system for classifying interference signals(110) includes an interferometer(104) including a light source(302) and a detector(304), and at least one processor(2404). The interferometer(104) is configured to provide a plurality of interference signals(110) each corresponding to a respective one of a plurality of positions on a surface of a semiconductor chip(202). A spectrum of the light source is greater than a spectrum of white light. The at least one processor(2404) is configured to classify the interference signals(110) into a plurality of categories using a model(608). Each of the categories corresponds to a region having a same material on the surface of the semiconductor chip(202).