PIEZOELECTRIC FILM AND PREPARATION METHOD THEREFOR, AND PIEZOELECTRIC FILM SENSOR

摘要

A piezoelectric film (100) and a preparation method therefor, and a piezoelectric film sensor (10). The piezoelectric film comprises a first substrate (110), a conductive layer (120), and a piezoelectric layer (130); the conductive layer is disposed on the first substrate; the conductive layer is an aged ITO layer; the crystallinity of the conductive layer is 80% or more; the piezoelectric layer is disposed on the conductive layer; the piezoelectric layer contains a fluoropolymer, and the fluoropolymer does not comprise an α-phase fluoropolymer. The piezoelectric film has a shorter crystallization time, it is easier to form a β phase, and the piezoelectric performance of the piezoelectric film is improved.