首页> 外国专利> ELECTROMAGNETIC WAVE DETECTION MODULE, ELECTROMAGNETIC WAVE DETECTION MODULE ROW, AND NONDESTRUCTIVE INSPECTION DEVICE

ELECTROMAGNETIC WAVE DETECTION MODULE, ELECTROMAGNETIC WAVE DETECTION MODULE ROW, AND NONDESTRUCTIVE INSPECTION DEVICE

机译:电磁波检测模块,电磁波检测模块排和非破坏性检查装置

摘要

The present invention provides an electromagnetic wave detection module in which wiring is formed to connect each detection element of an electromagnetic wave detection means configured by arranging a plurality of detection elements for detecting an electromagnetic wave in a two-dimensional array and a predetermined connection destination outside the electromagnetic wave detection means with good manufacturability and so as not to cause trouble in the detection of an electromagnetic wave as much as possible. A detection element group consisting of M detection elements (M is an integer of 2 or more) arranged in the Y-axis direction is arranged in N rows (N is an integer of 2 or more) in the X-axis direction orthogonal to the Y-axis direction, and MxN wirings electrically connecting each of the M×N detection elements and a predetermined connection destination outside any one end of the electromagnetic wave detection means in the Y-axis direction are provided on the common substrate surface.
机译:本发明提供一种电磁波检测模块,其中形成布线以通过布置用于检测二维阵列中的电磁波和外部预定连接目的地的多个检测元件来连接配置的电磁波检测装置的每个检测元件。电磁波检测装置具有良好的制造性,因此不要在尽可能地检测电磁波时造成麻烦。由M检测元件(m是设置在Y轴方向上的M检测元件(M是2或更多)组成的检测元件组以n行(n是2个或更多的整数),其x轴方向正交在公共衬底表面上设置Y轴方向和电连接每个M×N检测元件的接线和电磁波检测装置的任何一端的预定连接目的地。

著录项

  • 公开/公告号EP3702745A4

    专利类型

  • 公开/公告日2021-09-01

    原文格式PDF

  • 申请/专利权人 SYSTEM SQUARE INC.;

    申请/专利号EP20170929779

  • 发明设计人 IKEDA NORIAKI;MORIYAMA JUNJI;

    申请日2017-10-24

  • 分类号G01J1/44;G01J1/02;G01J1/42;G01T1/24;G01T7;G01V5;H01L27/146;H01L31/02;

  • 国家 EP

  • 入库时间 2022-08-24 22:23:12

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