Hafnium carbide powder for plasma electrodes, its manufacturing method, hafnium carbide sintered body and plasma electrode

摘要

To provide a hafnium carbide powder for plasma electrode capable of suppressing contamination of carbon particles as impurities and improving quality of the hafnium carbide powder, a manufacturing method therefor, a hafnium carbide sintered body and a plasma electrode.SOLUTION: A hafnium carbide powder for plasma electrode is a powder of hafnium carbide represented by a chemical formula HfC, wherein x=0.5 to 1.0, and having content of carbon particles as impurities of 0.03 mass% or less. Average particle diameter of the hafnium carbide powder is preferably 0.5 to 2 μm. When the hafnium carbide powder is manufactured, for example, a pellet 16 of hafnium oxide and a mixed powder of carbon is housed in a silicon carbide made second crucible 17, the second crucible 17 is arranged in a first crucible 12 and a heating reaction is conducted at 1800 to 2000°C and the hafnium carbide powder can be generated.SELECTED DRAWING: Figure 1