Physical quantity sensors, physical quantity sensor devices, composite sensor devices, inertial measurement units, portable electronic devices and mobile objects

摘要

A physical quantity sensor includes a movable portion including a first mass part on one side of a rotation axis, a second mass part on the other side, and a connection part that connects the first mass part to the second mass part. The connection part includes a first slit, a second slit on one side, and a third slit on the other side of the first slit. An axis along the first direction through the center of the first slit is referred to as a first central axis, an axis along the first direction through the center of the second slit is referred to as a second central axis, and an axis along the first direction through the center of the third slit is referred to as a third central axis, each of the second central axis and the third central axis is deviated in a direction of the rotation axis with respect to the first central axis.