首页> 外国专利> A chemically amplified positive photosensitive resin composition, a photosensitive dry film, a method for producing a photosensitive dry film, a method for producing a patterned resist film, a method for producing a molded substrate, and a method for producing a plated article

A chemically amplified positive photosensitive resin composition, a photosensitive dry film, a method for producing a photosensitive dry film, a method for producing a patterned resist film, a method for producing a molded substrate, and a method for producing a plated article

机译:化学放大的阳性光敏树脂组合物,光敏干膜,制备光敏干膜的方法,制备图案化抗蚀剂膜的方法,制备模塑基材的方法,以及制造镀晶制品的方法

摘要

A photosensitive dry film, a photosensitive dry film comprising: a chemically amplified positive photosensitive resin composition applicable to exposure with h line and excellent in plating solution resistance and crack resistance; and a photosensitive resin layer comprising a chemically amplified positive photosensitive resin composition; A method for manufacturing a patterned resist film using a chemically amplified positive photosensitive resin composition, a method for manufacturing a substrate with a mold using a chemically amplified positive photosensitive resin composition, and a substrate with a mold Provided is a method for manufacturing a plating object to be used. Chemically amplified positive containing an acid generator (A) and a resin (B) whose solubility in alkali is increased by the action of an acid and an acid generator (A) As a photosensitive resin composition, the acid generator (A) contains the acid generator which has a specific naphthalimide skeleton, and the ratio of the acrylic resin with respect to the sum total of resin other than resin (B) and resin (B) is 70 mass % or more.
机译:一种感光性干膜,一种光敏干膜,包括:化学放大的阳性光敏树脂组合物,适用于H线的暴露,具有优异的电镀溶液电阻和抗裂性;和一种光敏树脂层,其包含化学扩增的正光敏树脂组合物;使用化学放大的阳性光敏树脂组合物制造图案化抗蚀剂膜的方法,使用化学放大的阳性光敏树脂组合物制造具有模具的基板的方法,以及所提供模具的基板是制造电镀物体的方法要使用的。含有酸产生剂(A)和树脂(B)的化学扩增的阳性通过酸和酸产生剂(A)作为光敏树脂组合物的作用增加了碱的溶解度,酸产生剂(A)含有酸具有特定萘胺骨架的发电机和丙烯酸树脂相对于树脂(B)和树脂(B)以外的树脂的总和的比例为70质量%以上。

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