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STRUCTURE FOR INDIVIDUAL AUTHENTICATION, METHOD FOR PRODUCING THEREOF, AND INDIVIDUAL AUTHENTICATION METHOD
STRUCTURE FOR INDIVIDUAL AUTHENTICATION, METHOD FOR PRODUCING THEREOF, AND INDIVIDUAL AUTHENTICATION METHOD
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机译:用于个别认证的结构,产生方法和个别认证方法
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摘要
Provided is a structure for individual authentication in which a pillar pattern region including a plurality of nanopillars formed of synthetic quartz glass is formed on at least a part of a surface portion of a synthetic quartz glass substrate. In the pillar pattern region, the nanopillars have an indentation elastic modulus of 35 to 100 GPa as measured by a nanoindentation method, and the nanopillars are plastically deformed.
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