Plasma irradiation system and plasma irradiation method

摘要

The practicality of plasma irradiation system is improved.A plasma irradiation system 10 for irradiating a plasma to an object to be processed;Plasma irradiation systemA feeder that supplies a substrate whose optical properties change due to plasma irradiationThe base material fed by the feederAn imparting device 12 to be applied to an object to be processed andBase material to be treated andA plasma irradiating apparatus 14 for irradiating a plasma with an object to be treatedA plasma irradiation system comprising measuring apparatus 16 for measuring optical properties of a substrate irradiated by plasma by means of a plasma irradiation apparatus.Diagram