Impedance matching network model based correction schemes and performance repeatability

摘要

A matching network system for a radio frequency (RF) power supply system includes a matching network with a tunable device.The matching network introduces a variable impedance between the RF generator and the load.The stepper motor adjusts the position of the tunable device.A matching network system also includes a controller that communicates with a matching network.The controller receives the position of the stepper motor and compares the position with the stored predetermined position.The controller generates position correction and applies position correction to the position to provide improved repeatability or reproducibility.