TEMPERATURE MEASUREMENT AND TEMPERATURE CALIBRATION METHODS AND TEMPERATURE MEASUREMENT SYSTEM

摘要

A temperature measurement method includes: a temperature calibrator with a first test structure of which a resistance forms a first functional relationship with a temperature is placed on a stage in a chamber; a temperature of the chamber is made to reach a set temperature; a voltage is applied to two opposite ends of the first test structure to obtain a corresponding current and a corresponding resistance; and an actual temperature of the temperature calibrator is acquired according to the resistance and the first functional relationship.