TEMPERATURE MEASUREMENT METHOD, TEMPERATURE CALIBRATION METHOD AND TEMPERATURE MEASUREMENT SYSTEM

摘要

Provided is a temperature measurement method, comprising: placing a temperature calibration device of a first testing structure on a bearing table inside a chamber, wherein the first testing structure has a first function relationship between resistance and temperature; making the temperature of the chamber reach a set temperature; applying a voltage to two opposite ends of the first testing structure to obtain corresponding currents and resistance; and according to the resistance and the first function relationship, acquiring the actual temperature of the temperature calibration device. Further provided are a temperature calibration method and a temperature measurement apparatus, which are based on the temperature measurement method.