DISTORTION MEASUREMENT METHOD FOR ELECTRON MICROSCOPE IMAGE, ELECTRON MICROSCOPE, DISTORTION MEASUREMENT SPECIMEN, AND METHOD OF MANUFACTURING DISTORTION MEASUREMENT SPECIMEN

摘要

A distortion measurement method for an electron microscope image includes: loading a distortion measurement specimen (1) having structures arranged in a lattice to a specimen plane of an electron microscope (100) or a plane (14) conjugate to the specimen plane in order to obtain an electron microscope image of the distortion measurement specimen (1); and measuring a distortion from the obtained electron microscope image of the distortion measurement specimen (1).