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Distortion measurement method for electron microscope image, electron microscope, distortion measurement specimen, and method of manufacturing distortion measurement specimen
Distortion measurement method for electron microscope image, electron microscope, distortion measurement specimen, and method of manufacturing distortion measurement specimen
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机译:电子显微镜图像的畸变测量方法,电子显微镜,畸变测量样本以及畸变测量样本的制造方法
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摘要
A distortion measurement method for an electron microscope image includes: loading a distortion measurement specimen having structures arranged in a lattice to a specimen plane of an electron microscope or a plane conjugate to the specimen plane in order to obtain an electron microscope image of the distortion measurement specimen; and measuring a distortion from the obtained electron microscope image of the distortion measurement specimen.
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