DIFFRACTION DEVICE AND METHOD FOR NON-DESTRUCTIVE TESTING OF INTERNAL CRYSTAL ORIENTATION UNIFORMITY OF WORKPIECE

摘要

A diffraction device and a method for non-destructive testing of internal crystal orientation uniformity of a workpiece. The diffraction device comprises: an X-ray irradiation system used for irradiating X-ray to a measuring part of a measured sample (4); an X-ray detection system used for detecting a plurality of diffraction X-rays formed by diffracting the X-ray with a plurality of parts of the measured sample (4), to measure X-ray diffraction intensity distribution of the measured sample (4). The detected X-ray is short-wavelength feature X-ray, and the X-ray detection system is an array detection system (5). The method comprises steps of selecting the short-wavelength feature X-ray, performing texture analysis on the measured sample (4), and determining a diffraction vector Q to be measured; and obtaining the X-ray diffraction intensity of the corresponding part of the measured sample (4). The method can rapidly and non-destructively test the internal crystal orientation uniformity of a centimeter-thick workpiece in its entire thickness direction, and implement online testing and characterization of the internal crystal orientation uniformity of the centimeter-thick workpiece in the entire thickness direction of its movement trajectory.