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MANUFACTURING MEHTOD OF MANDREL FOR MANUFACTURING MICRO PRODUCT, MANUFACTURING METHOD OF MOLD FOR MANUFACTURING MICRO PRODUCT AND MOLD FOR MANUFACTURING MICRO PRODUCT
MANUFACTURING MEHTOD OF MANDREL FOR MANUFACTURING MICRO PRODUCT, MANUFACTURING METHOD OF MOLD FOR MANUFACTURING MICRO PRODUCT AND MOLD FOR MANUFACTURING MICRO PRODUCT
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机译:用于制造微产的心轴的制造方法,制造微产物的模具制造方法和用于制造微产物的模具
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摘要
An embodiment of the present invention relates to a micro-product manufacturing technology, comprising the steps of: preparing a substrate having a surface roughness in a certain range; Forming a photosensitive layer on the substrate: and performing a lithography process to manufacture a mandrel having a model upper part made of model images in which a taper slope according to the surface roughness is formed on the outer surface or the inner surface on the substrate It provides a method of manufacturing a mandrel for manufacturing a micro product, characterized in that it comprises a step;
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