首页> 外国专利> MANUFACTURING MEHTOD OF MANDREL FOR MANUFACTURING MICRO PRODUCT, MANUFACTURING METHOD OF MOLD FOR MANUFACTURING MICRO PRODUCT AND MOLD FOR MANUFACTURING MICRO PRODUCT

MANUFACTURING MEHTOD OF MANDREL FOR MANUFACTURING MICRO PRODUCT, MANUFACTURING METHOD OF MOLD FOR MANUFACTURING MICRO PRODUCT AND MOLD FOR MANUFACTURING MICRO PRODUCT

机译:用于制造微产的心轴的制造方法,制造微产物的模具制造方法和用于制造微产物的模具

摘要

An embodiment of the present invention relates to a micro-product manufacturing technology, comprising the steps of: preparing a substrate having a surface roughness in a certain range; Forming a photosensitive layer on the substrate: and performing a lithography process to manufacture a mandrel having a model upper part made of model images in which a taper slope according to the surface roughness is formed on the outer surface or the inner surface on the substrate It provides a method of manufacturing a mandrel for manufacturing a micro product, characterized in that it comprises a step;
机译:本发明的一个实施例涉及一种微型产品制造技术,包括以下步骤:制备在一定范围内具有表面粗糙度的基板; 在基板上形成光敏层:进行光刻工艺以制造具有由模型图像制成的模型上部的心轴,其中根据表面粗糙度的锥形斜率形成在基板上的外表面或内表面上 提供一种制造用于制造微量产品的心轴的方法,其特征在于它包括步骤;

著录项

  • 公开/公告号KR102318018B1

    专利类型

  • 公开/公告日2021-10-28

    原文格式PDF

  • 申请/专利权人

    申请/专利号KR1020190081231

  • 申请日2019-07-05

  • 分类号G03F7;G03F7/16;G03F7/20;G03F7/26;H01L21/027;H01L21/3213;H01L21/324;

  • 国家 KR

  • 入库时间 2022-08-24 21:59:18

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