Zincate treatment and doping of metal liners for liner passivation and adhesion improvement

摘要

A method for forming a self formed barrier in a feature of the substrate;Including the following operation: depositing a metal liner within the substrate's featuresMetal linerDeposited on the dielectric of the substrate;Depositing a zinc containing precursor on a metal liner;Implementing the thermal soak of the substrate;Depositing a zinc containing precursor and repeating the thermal soak of the substrate over a predetermined number of cycles.The method forms a zinc containing barrier layer at the interface between the metal liner and the dielectric.Diagram