Signal processing system for a measuring displacement amount and a improving displacement data error and Drive method of the Same

摘要

The present invention discloses a metrology control technique. That is, the signal processing system for measuring the displacement amount and improving the displacement data error and the driving method thereof according to the embodiment of the present invention correct the accumulated error of the measurement data obtained from the measurement sensor through the FFT and the LPF that executes the first and second orders. By doing so, signal processing is performed so that high-quality measurement data can be clearly transmitted from the output terminal and the receiving-side communication terminal.