首页> 外国专利> METHOD FOR PREPARING LARGE-SIZE SINGLE CRYSTAL

METHOD FOR PREPARING LARGE-SIZE SINGLE CRYSTAL

机译:制备大尺寸单晶的方法

摘要

A method for preparing a large-size single crystal, belonging to the field of semiconductor material preparation, and particularly relating to a method for preparing a large-size single crystal from a plurality of small-size single crystals in form of a solid state connection. The method comprises the following steps: material selection: selecting semiconductor single crystal blocks having integrally similar physical characteristics and basically consistent crystal-orientation precision of connecting surfaces; connecting surface treatment: carrying out orientation, polishing and acid pickling treatments on the connecting surfaces of the semiconductor single crystal blocks; single crystal connection: connecting the connecting surfaces of the treated single crystal blocks to each other; and single crystal splicing: applying specific pressure to the connected single crystal blocks in a vacuum clean environment or in a volatile atmosphere to complete the preparation of the large-size single crystal. The method has the beneficial effects that small-size single crystal blocks are connected to prepare a large-size single crystal, the device needed is simple, the preparation process is simple to control, and theoretically, single crystals of any size can be prepared.
机译:一种制备大尺寸单晶的方法,属于半导体材料制备领域,特别是与用于在固态连接的形式的来自多个小尺寸单晶的大尺寸单晶制备大尺寸单晶的方法。该方法包括以下步骤:材料选择:选择具有一体相似的物理特性的半导体单晶块,基本上一致的连接表面的晶体取向精度;连接表面处理:在半导体单晶块的连接表面上进行方向,抛光和酸性酸洗处理;单晶连接:将处理的单晶块的连接表面彼此连接;和单晶拼接:在真空清洁环境中或在挥发性气氛中对连接的单晶块施加比压力,以完成大尺寸单晶的制备。该方法具有小尺寸单晶块连接到制备大尺寸单晶的有益效果,所需的装置简单,制备过程简单,控制简单,并且可以制备任何尺寸的单个晶体。

著录项

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号