ALGAINP-BASED LIGHT EMITTING DIODE CHIP AND MANUFACTURING METHOD THEREFOR
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机译:基于AlGainP的发光二极管芯片及其制造方法
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摘要
An AlGaInP-based light emitting diode chip and a manufacturing method therefor, relating to the technical field of semiconductors. The AlGaInP-based light emitting diode chip comprises: a transition bonding layer (110) arranged between a sapphire substrate (301) and an epitaxial layer, and a composite bonding layer (201) arranged between the sapphire substrate (301) and the transition bonding layer (110). The composite bonding layer (201) is an Al2O3/Si3N4/SiO2 composite layer, wherein Al2O3 in the composite bonding layer (201) is in contact with the transition bonding layer (110). The transition bonding layer (110) and the layer of the epitaxial layer contacting the transition bonding layer (110) are both P-type Gap layers. The AlGaInP-based light emitting diode chip can improve the bonding yield between the sapphire substrate (301) and the epitaxial layer.
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机译:基于AlGaInP的发光二极管芯片和其制造方法,与半导体技术领域有关。 基于AlGaInP的发光二极管芯片包括:在蓝宝石衬底(301)和外延层之间的过渡键合层(110),以及布置在蓝宝石衬底(301)和过渡键合之间的复合接合层(201) 层(110)。 复合粘合层(201)是Al 2 O 3 / Si3N4 / SiO 2复合层,其中复合粘合层(201)中的Al 2 O 3与过渡键合层(110)接触。 过渡键合层(110)和接触过渡键合层(110)的外延层的层是P型间隙层。 基于AlGaInP的发光二极管芯片可以改善蓝宝石衬底(301)和外延层之间的键合产率。
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