Superconducting resonators that limit vertical connections in planar quantum devices

摘要

Problem to be solved: to provide a superconducting coupling device, a method and a superconductor fabrication system for a superconducting resonator which limits vertical connection in a planar quantum device.Solution: a pair of superconducting devices are interconnected in the lattice, and the superconducting connection is in the fabrication plane by crossing the components of the second superconducting device located within a single two-dimensional fabrication plane, leaving a set of first superconducting devices The grid is made in the fabrication plane so that it can only be reached.A superconducting coupling device having span and clearance height is formed in the superconducting connection of the first superconducting device.The section of the superconducting coupling device is separated from the components of the second superconducting device by a clearance in a parallel plane.By using a superconducting coupling device, the potential of the first groundplane on the first side of the component is equal to the second groundplane of the second side of the component.Diagram