A method for double-sided grinding of workpieces and a device for double-sided grinding of workpieces

摘要

The method for double-side polishing of a workpiece of the present invention includes a pre-polishing index calculation step of calculating an index Xp for a workpiece subjected to double-side polishing after double-side polishing in a previous batch, and a predetermined predictive formula, a target polishing time calculation step of calculating a target polishing time in In addition, the double-sided polishing apparatus for a workpiece according to the present invention comprises: a measurement unit for measuring the thickness of the workpiece subjected to the double-side polishing after double-side polishing in the previous batch; a first calculation unit for calculating the index Xp; A second calculation unit for calculating the target polishing time Tt in the current batch by using the prediction equation of