LASER PROCESSING APPARTUS FOR QUARTZ WARE AND LASER PROCESSING METHOD FOR QUARTZ WARE

摘要

Embodiments of the present invention provide a laser processing apparatus for quartz wear and a laser processing method for quartz wear. A laser processing apparatus for quartz wear according to an embodiment of the present invention includes a laser oscillation unit that oscillates a laser beam, a split unit that splits the laser beam into a laser beam having a first polarization state and a second polarization state into a laser beam, and a first equalization unit for equalizing energy distribution of the laser beam having the first polarization state, and an irradiation lens unit for irradiating the equalized laser beam.