首页> 外国专利> TRANSFER APPARATUS FOR PREVENTING LEAKAGE OF TOXIC COMBUSTIBLE SEMICONDUCTOR SPECIAL GAS

TRANSFER APPARATUS FOR PREVENTING LEAKAGE OF TOXIC COMBUSTIBLE SEMICONDUCTOR SPECIAL GAS

机译:用于防止毒性可燃半导体特殊气体泄漏的转移装置

摘要

The present invention comprises: a transfer cart having a seating plate on which a plurality of gas containers can be securely seated, and having a wheel member to enable a worker to hold and transfer a frame member supported by the seating plate; a stopper device which is installed to surround a valve of the gas container and prevents the diffusion of a special gas into the air when the special gas leaks from the valve; an auxiliary container seated on the seating plate and filled with nitrogen gas to supply nitrogen gas into the stopper device; a scrubber which adsorbs and purifies harmful components contained in the special gas while discharging, to the outside of the stopper device, a special gas that is lost into the stopper device and thus increases the pressure inside the stopper device; and a connecting part connecting the stopper device to the auxiliary container and connecting the stopper device to the scrubber.
机译:本发明包括:转印推车,其上有一个座板,其中多个气体容器可以牢固地坐着,并且具有轮子构件,以使工人能够保持和转移由座板支撑的框架构件; 安装在气体容器的阀门围绕气体容器的止动装置,并在特殊的气体从阀门泄漏时防止特殊气体扩散到空气中; 辅助容器坐在座板上并填充有氮气,以将氮气供应到止动装置中; 一种洗涤器,其吸附和净化特殊气体中包含的有害部件,在止动装置的外部,丢失进入塞子装置的特殊气体,从而增加了塞子装置内的压力; 以及将止动装置连接到辅助容器并将塞子装置连接到洗涤器的连接部分。

著录项

  • 公开/公告号WO2021206237A1

    专利类型

  • 公开/公告日2021-10-14

    原文格式PDF

  • 申请/专利权人 WIC CO. LTD.;

    申请/专利号WO2020KR12562

  • 发明设计人 KONG WON SECK;

    申请日2020-09-17

  • 分类号F17C13/08;F17C13/06;H01L21/67;

  • 国家 KR

  • 入库时间 2022-08-24 21:43:10

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