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Scanning microscope using pulsed illumination and MSIA
Scanning microscope using pulsed illumination and MSIA
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机译:使用脉冲照明和马来西亚扫描显微镜
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摘要
According to one aspect, an instrument for scanning a specimen. The instrument includes a scanning stage for supporting the specimen, a detector having a plurality of pixels, the scanning stage and the detector movable relative to each other to move the specimen in a scan direction during a scan, and a pulsed illumination source synchronized with the motion of the specimen on the scanning stage. At least some of the pixels of the detector are operable to collect light emitted from the specimen during the scan due to the pulsed illumination source and generate corresponding image data. The instrument may further include a processor operable to perform MSIA on the image data to generate an image of the specimen.
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