Method for manufacturing metal magnetic particles, inductors, metal magnetic particles, and method for manufacturing metal magnetic cores

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a metal magnetic particle and an inductor, a metal magnetic particle and a metal magnetic core having excellent insulating properties and DC superimposition characteristics. SOLUTION: The metal magnetic particles 1 are provided with an oxide layer on the surface of an alloy particle 10 containing Fe and Si, and the oxide layer is a first oxide layer 20 and a second oxide from the alloy particle side. It has a material layer 30 and a third oxide layer 40. The first oxide layer 20, the second oxide layer 30, and the third oxide layer 40 all contain Si. In the line analysis of the element content using the scanning transmission electron microscope-energy dispersive X-ray analysis, the first oxide layer 20 is a layer in which the Fe content is smaller than the Si content in the alloy particles, and the second oxide is oxidized. The material layer 30 is a layer in which the amount of Fe is larger than the amount of Si in the alloy particles, and the third oxide layer 40 is a layer in which the amount of Fe is smaller than the amount of Si in the alloy particles. [Selection diagram] Fig. 1